• Direct Imaging Lithography Machine with Advanced Air Float Platform Technology
  • Direct Imaging Lithography Machine with Advanced Air Float Platform Technology
  • Direct Imaging Lithography Machine with Advanced Air Float Platform Technology
  • Direct Imaging Lithography Machine with Advanced Air Float Platform Technology
  • Direct Imaging Lithography Machine with Advanced Air Float Platform Technology
  • Direct Imaging Lithography Machine with Advanced Air Float Platform Technology

Direct Imaging Lithography Machine with Advanced Air Float Platform Technology

After-sales Service: Provide
Condition: New
Certification: ISO
Warranty: 12 Months
Automatic Grade: Automatic
Installation: Vertical
Customization:
Gold Member Since 2023

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Jiangsu, China
QA/QC Inspectors
The supplier has 1 QA and QC inspection staff
R&D Capabilities
The supplier has 1 R&D engineers, you can check the Audit Report for more information
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  • Overview
  • Product Description
  • Application
  • Exhibition & Customers
  • Packaging & Shipping
  • FAQ
Overview

Basic Info.

Model NO.
DPS-04
Driven Type
Electric
Product Name
Direct Imaging Lithography
Application
Hard Board, Soft Board
Advantage
Factory Price
After-Sale Service
Provided
Transport Package
Customized or Wooden Box Packaging
Specification
Standard Specifications
Trademark
Himalaya
Origin
China

Product Description

Product Description
DPS-04 Product advantages
High resolution optical lens improves line quality
Automatic optical focusing integration technology to overcome the uneven thickness of the board
Advanced air float platform technology
Single table standard model
Direct Imaging Lithography Machine with Advanced Air Float Platform Technology
Maximum substrate size 610mm×630mm (24"× 24")
Minimum substrate size 300mm×300mm (12"× 12")
Substrate thickness 0.1mm~5.0mm
Analyze 4μm/4μm
Resolution 200nm
Linewidth accuracy ±0.4μm
Depth of focus ±200μm (AutoFocus)
Alignment accuracy ±2μm@610mm×630mm
Capacity <42s/pcs @ 610mm×630mm & 100mj/cm²&Each piece of four-point counterpoint X
Imaging material photoresistance or high sensitivity dry film
Light source spectrum 405±5nm
Exposure energy 10-1000mj/cm² or higher
Application hard board, soft board, soft and hard combined board,Wafer
Data entry Gerber274X, Gerber274D, DXF
Single power supply AC380V-50HZ-15KW(main equipment) three-phase five wire
Overall dimension(L×W×H) (Drum line)6500×1000×1500 ,DI equipment)3500×1745×2050,(Feed/discharge port + mechanical arm) 1000×1745×2050
Room temperature/humidity 22ºC±2ºC, 40%-60%(non-condensation)
Basic growth and contraction management fixed growth and contraction, automatic growth and contraction, segment growth and contraction
StampFunctions date, time, serial number, expansion and contraction coefficient, etc.
Data entry ODB++


DPS-02 Product advantage
High resolution optical lens improves line quality
Automatic optical focusing integration technology to overcome the uneven thickness of the board.
Advanced air float platform technology
Single table standard model

Direct Imaging Lithography Machine with Advanced Air Float Platform Technology

Wafer size 100/150/200/300mmWafer(selectable)
Analyze 2μm L/S
Linewidth accuracy ±10%
Depth of focus 20μm
Front engraving accuracy 1μm
Imaging material photoresist(PR)
Light source spectrum 405±5nm
capacity 40WPH@12inch
Exposure energy 20-1000mj/cm² or higher
Total power of light source 6W
Data entry GDSII, Gerber274X, ODB++
Applicable technology Frontal exposure,The right side Alignment
Single power supply AC380V-50HZ-8KW(Primary equipment)
Weight per unit 2000kg
Overall dimension(L×W×H) 1810mmL×1700mmW×2105mmH
Temperature/humidity 22ºC±1ºC, 40%-60%(non-condensation)
OverlayCompensation fixed Overlay,Auto Overlay
 
Application

Direct Imaging Lithography Machine with Advanced Air Float Platform Technology

Exhibition & Customers

Direct Imaging Lithography Machine with Advanced Air Float Platform TechnologyDirect Imaging Lithography Machine with Advanced Air Float Platform TechnologyJiangsu Himalaya Semiconductor Co., Ltd. Was established in 2019, mainly engaged in international trade and integration of semiconductor industry equipment. The equipment is currently imported and exported to over 30 countries, with over 200 customers and suppliers, aiming to control the procurement of the highest cost-effective products in the final stage for customers, and strive for one-time payment collection and risk avoidance for suppliers!
Our main products:Die Bonder,Wire Bonding,Laser Marking(ID IC Wafer),Laser Grooving,Laser Cutting(Glass Ceramics Wafers Packaging,Laser Internal Modification Machine Si /Sic Wafe,Laser Internal Modification Machine Lt/Ln Wafer,Laser Annealing Machine for Si/Sic,Automatic Dicing Saw Machine(Wafer Packaging)),Automatic Silicone Dispensing Equipment.

Packaging & Shipping

 

Direct Imaging Lithography Machine with Advanced Air Float Platform Technology
FAQ

Q1:How to choose a suitable machine?
A1:You can tell us the working piece material, size, and the request of machine function. We can recommend the most suitable machine according to our experience. 

Q2:What is the warranty period for the equipment?
A2:One year warranty and 24 hours online professional technical support.


Q3:How to choose a suitable machine?
A3:You can tell us the request of machine function. We can recommend the most suitable machine according to our experience. 

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