Automatic Plasma Treatment System Cleaning Machine with Stainless Steel of The Vacuum Chamber

• After-sales Service: Provided
• Condition: New
• Warranty: 12 Months
• Automatic Grade: Automatic
• Installation: Vertical
• Driven Type: Electric
• Product Name: Plasma Cleaning Machine
• Feature 1: Adjustable
• Feature 2: Environmental Protection
• OEM/ODM Service: Provided
• Transport Package: Customized or Wooden Box Packaging
• Specification: Standard Specifications
• Trademark: Himalaya
• Origin: China

Product Description

Product Description

1.  Stainless steel of the vacuum chamber;

2.  Ultra low temperature -  The temperature is as low as 40 ºC;

3.  Omnidirectional surface cleaning -  Different plasma can enter the ultra-fine slit for cleaning;

4.  Environmental protection - No harmful substances are produced before and after treatment, and keep away from the harmful solvents to human body;

5.  Stability - Continuity and constancy to maintain the stability of machinery and equipment during operation;

6.  Cleaning - Remove dust and oil, fine cleaning and static electricity;

7.  Excitation - Improve the adhesion ability of the surface and greatly increase the surface energy of the object;

8.  Platy stripping -  AF / AS layer platy stripping.
 

Function  configuration	Technical parameter
Model	VP-60L	VP-80L	VP-100L	VP-150L
Dimensions (mm)	L=1200;  W=920;  H=1690
Vacuum chamber  dimensions (mm)	L=403; W=400;H=403	L=450; W=400;H=450	L=470; W=460;H=470	L=500; W=600;H=500
Vacuum chamber  material	Stainless steel
Electrode plate  dimensions (mm)	319(L)×374(W)	320(L)×420(W)	380(L)×440(W)	520(L)×470(W)
Electrode plate  material	Special aluminum electrode
Weight(kg)	560	580	630	680
Control	PLC+ Touch screen
Electrode plate  structure	Horizontal 8 layers
Vacuum pump system	Two-stage rotary plate vacuum pump/ Roots vaccum pump
Vacuum  measurement  system	Pilani resistance vacuum gauge
Gas measuring  system	High precision mass flowmeter
Plasma generator	High precision 0-500W plasma generator			High precision  0-1000W  plasma generator
Plasma matching unit	High precision 0-500W automatic matching unit			High precision  0-1000W  automatic matching  unit
Working vacuum	10-100 Pa
Limit pressure of  vacuum pump	5×10-1 Pa
Time to achieve  vacuum time(s)	≤ 55	≤ 70	≤ 80	≤ 100
Time to release  vacuum time(s)	≤ 15	≤ 20	≤ 25	≤ 30
Gas control range (sccm)	Mass flow 0-300 (optional)			Mass flow  0-500  (optional)
Radio frequency  power supply (w)	0-500 (Adjustable in range)			0-1000(Adjustable in range)
Mode of operation	Manual, one key automatic operation
Power supply	Three phase 380V
Rated power (kw)	4

Exhibition & Customers

Jiangsu Himalaya Semiconductor Co., Ltd. Was established in 2019, mainly engaged in international trade and integration of semiconductor industry equipment. The equipment is currently imported and exported to over 30 countries, with over 200 customers and suppliers, aiming to control the procurement of the highest cost-effective products in the final stage for customers, and strive for one-time payment collection and risk avoidance for suppliers!
Our main products:Die Bonder,Wire Bonding,Laser Marking(ID IC Wafer),Laser Grooving,Laser Cutting(Glass Ceramics Wafers Packaging,Laser Internal Modification Machine Si /Sic Wafe,Laser Internal Modification Machine Lt/Ln Wafer,Laser Annealing Machine for Si/Sic,Automatic Dicing Saw Machine(Wafer Packaging)),Automatic Silicone Dispensing Equipment.

Packaging & Shipping

 

FAQ

Q1:How to choose a suitable machine?
A1:You can tell us the working piece material, size, and the request of machine function. We can recommend the most suitable machine according to our experience. 

Q2:What is the warranty period for the equipment?
A2:One year warranty and 24 hours online professional technical support.

Q3:How to choose a suitable machine?
A3:You can tell us the request of machine function. We can recommend the most suitable machine according to our experience.