| Customization: | Available |
|---|---|
| After-sales Service: | Provided |
| Condition: | New |
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1. Stainless steel of the vacuum chamber;
2. Ultra low temperature - The temperature is as low as 40 ºC;
3. Omnidirectional surface cleaning - Different plasma can enter the ultra-fine slit for cleaning;
4. Environmental protection - No harmful substances are produced before and after treatment, and keep away from the harmful solvents to human body;
5. Stability - Continuity and constancy to maintain the stability of machinery and equipment during operation;
6. Cleaning - Remove dust and oil, fine cleaning and static electricity;
7. Excitation - Improve the adhesion ability of the surface and greatly increase the surface energy of the object;
8. Platy stripping - AF / AS layer platy stripping.
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Function configuration |
Technical parameter | |||
| Model | VP-60L | VP-80L | VP-100L | VP-150L |
| Dimensions (mm) | L=1200; W=920; H=1690 | |||
|
Vacuum chamber dimensions (mm) |
L=403; W=400;H=403 | L=450; W=400;H=450 | L=470; W=460;H=470 | L=500; W=600;H=500 |
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Vacuum chamber material |
Stainless steel | |||
|
Electrode plate dimensions (mm) |
319(L)×374(W) | 320(L)×420(W) | 380(L)×440(W) | 520(L)×470(W) |
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Electrode plate material |
Special aluminum electrode | |||
| Weight(kg) | 560 | 580 | 630 | 680 |
| Control | PLC+ Touch screen | |||
|
Electrode plate structure |
Horizontal 8 layers | |||
| Vacuum pump system | Two-stage rotary plate vacuum pump/ Roots vaccum pump | |||
|
Vacuum measurement system |
Pilani resistance vacuum gauge | |||
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Gas measuring system |
High precision mass flowmeter | |||
| Plasma generator | High precision 0-500W plasma generator |
High precision 0-1000W plasma generator |
||
| Plasma matching unit | High precision 0-500W automatic matching unit |
High precision 0-1000W automatic matching unit |
||
| Working vacuum | 10-100 Pa | |||
|
Limit pressure of vacuum pump |
5×10-1 Pa | |||
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Time to achieve vacuum time(s) |
≤ 55 | ≤ 70 | ≤ 80 | ≤ 100 |
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Time to release vacuum time(s) |
≤ 15 | ≤ 20 | ≤ 25 | ≤ 30 |
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Gas control range (sccm) |
Mass flow 0-300 (optional) |
Mass flow 0-500 (optional) |
||
|
Radio frequency power supply (w) |
0-500 (Adjustable in range) |
0-1000(Adjustable in range) |
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| Mode of operation | Manual, one key automatic operation | |||
| Power supply | Three phase 380V | |||
| Rated power (kw) | 4 | |||
Jiangsu Himalaya Semiconductor Co., Ltd. Was established in 2019, mainly engaged in international trade and integration of semiconductor industry equipment. The equipment is currently imported and exported to over 30 countries, with over 200 customers and suppliers, aiming to control the procurement of the highest cost-effective products in the final stage for customers, and strive for one-time payment collection and risk avoidance for suppliers!
Our main products:Die Bonder,Wire Bonding,Laser Marking(ID IC Wafer),Laser Grooving,Laser Cutting(Glass Ceramics Wafers Packaging,Laser Internal Modification Machine Si /Sic Wafe,Laser Internal Modification Machine Lt/Ln Wafer,Laser Annealing Machine for Si/Sic,Automatic Dicing Saw Machine(Wafer Packaging)),Automatic Silicone Dispensing Equipment.
Q1:How to choose a suitable machine?
A1:You can tell us the working piece material, size, and the request of machine function. We can recommend the most suitable machine according to our experience.
Q2:What is the warranty period for the equipment?
A2:One year warranty and 24 hours online professional technical support.
Q3:How to choose a suitable machine?
A3:You can tell us the request of machine function. We can recommend the most suitable machine according to our experience.
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