| Customization: | Available |
|---|---|
| After-sales Service: | 1 Year |
| Warranty: | 1 Year |
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A. Product overview
1.1 Application Fields
Single chip dryer is a high cleanliness cleaning and drying equipment, with high-speed drying, fast drying characteristics, according to different wafer sizes, can be quickly replaced by the drying head to achieve. It is the main equipment of wet cleaning process, small size and smooth operation. It is mainly used for the drying process of 2-8 inch semiconductor wafers, mask plates, various substrates and other materials. It has the advantages of low cost, fast application and production.
1.2 Appearance
1.2.1 Overall dimensions:
1.2.2 Body structure: imported PP board shell
1.2.3 Suitable for 2 "-8" wafer processing
1.3 Process Parameters
1.3.1 Simple direct speed control panel
1.3.2 Rotation speed: 100-6000 r/min
1.3.3 Running time: 0-999S
1.4 Device Configuration
1.4.1 Quick Removal and Replacement of the dryer Head (Quick-insert)
1.4.2 Clean valve fittings
1.4.3 Spray flush cleaning function (optional)
1.4.4 Nitrogen Heating and Blowing (Optional)
1.4.5 Static elimination device and resistivity detection control and probe (optional)
1.5 Power parameters
1.5.1 Electrical: 220V, 1KW
1.5.2 N2: OD6mm tube, pressure: 0.25-0.3Mpa, flow: 5L/min (no optional nitrogen heating function is not available)
1.5.3DI: OD6mm tube, pressure: 0.3-0.4Mpa, flow: 5L/min (no optional flushing function is not available)
1.5.4 Drainage: OD 12mm(PFA)
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