Product Description
1. Product overview
Ion implanter is one of the high pressure small accelerators with the largest number of applications. It is the ion source to obtain the required ions, after the acceleration of several hundred thousand electron volts energy of the ion beam, used for semiconductor materials, large-scale integrated circuits and devices ion injection, but also used for metal materials surface modification and film making.
2. Device features
The maximum acceleration energy of univalent ion is ≥200keV, and the deceleration system is increased to achieve the energy range of univalent ion in 5keV~200keV
Available for 2, 3, 4, 6, 8 inch wafers and irregular fragments
B, P, As, Al, S, H, Mg, Si ions can be injected
Injection dose accuracy ≤1.5%
Ion implantation dose range: 1×1011 at/cm2 ~ 1×1016 at/cm2
Ion source part: ion source, ion source gas system and ion source extraction system
The ion source system is equipped with five vaporizers that generate ions from a solid evaporation source at a temperature of 700 ° C to achieve ion implantation from a solid source
Ion implantation tilt angles are 0° and 7°
Room temperature station: 0° and 7°; High temperature station: 0°
Beam adjustment system mainly includes: mass analyzer, beam convergence system, acceleration system, scanning system, beam detection and high voltage insulated transformer
The vacuum system mainly includes: Ion Source vacuum system, Beam Line vacuum system, End Station vacuum system, vacuum tubes and valves in the vacuum system and vacuum detection unit
Vacuum degree:
Ion Source vacuum: ≤7×10-4Pa
Beam Line vacuum: ≤7×10-5Pa
End Station vacuum: ≤7×10-5Pa
Detailed Photos
Exhibition & Customers
Field Application
FAQ
Q1:How to choose a suitable machine?
A1:You can tell us the working piece material, size, and the request of machine function. We can recommend the most suitable machine according to our experience.
Q2:What is the warranty period for the equipment?
A2:One year warranty and 24 hours online professional technical support.
Q3:How to choose a suitable machine?
A3:You can tell us the request of machine function. We can recommend the most suitable machine according to our experience.
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